ProSciTech is one of the best suppliers of targets - anywhere. We supply high purity sputtering targets, and these are well produced and modestly priced. Available are a wide range of unmounted disks or washer (annular) type sputtering targets, as well as targets mounted on backing plates, replacing the original target holders.
Ask if you require a mounted target.
Often targets are mounted to a backing plate using a conductive glue. Alternatively, if the target is over-sized, the edge may be formed around the edge of the backing plate - if the target material is soft. If that is your preferred method, please order the target with at least 2mm greater diameter than the backing plate is.
Additionally we can source many other sputtering targets in a variety of materials including ceramics, rare earth elements and metal oxides.
Here are some examples of sputter target materials that we have supplied:
W, Ag, Ti, Ce, ZnS, Au/Pd 60:40, Au/Pd 80:20, Zirconium oxide with 10-15%wt Y2O3, Cr, Au, Al, Pt, Ir, Cu, Ag/Cu 90:10, Fe, Si micro-crystalline, Si polycrystalline, Si n-type, Si p-type, Si undoped.
Metal targets unless otherwise stated are 4N pure - which is 99.99%.
Note: All listed targets made from Au/Pd are in the ratio 60:40.
Amalgams are more expensive to produce. So if an amalgam is sought to attain a finer coating, then it may be better to purchase Pt in lieu of Au/Pd, or Ir in lieu of Pt/Pd.
Most used for metal coatings in electron microscopy is gold. Evaporated or sputtered gold until it’s a fairly thick coating forms islets and these give gold coating at high powers (> x30k) a granular appearance.
Finest, least granular coatings as are required for FESEM are obtained using chromium and iridium . Chromium like Ir is practically grain-free, but since
Cr and its coatings readily oxidise, Ir is now regarded as the superior high resolution coating material. Ir also is a "harder" (by atomic number) element and its coatings should yield higher resolution.
Iridium is hard and brittle and the thinnest practical Ir target is 0.3mm - they are fairly expensive, please ask. We have a very good supplier who refuses to make 0.3mm Ir targets, but supplies 1mm Ir targets at 0.3mm prices and they are good!
Please ask for a quotation for all unlisted/ not priced targets.
FAQ: How to mount targets in a sputter coater
Most targets are held by a cover or are crimped around the edge - if yours is not that type it must be glued.
The 'glue' used must be electrically conducting.
For 'professional' mounting use a few slivers of indium wire on the support plate, cover with the target and then either place in an oven with a flat weight on top of the target, or use a smoothing iron to heat the gold and hence melt the indium. Placing something like a piece of lens tissue onto the target would protect it.
A temperature a little higher than melting point of indium is required (m.p. 156.6°C) for a short time.
Alternatively use a bit of silver conducting paint, preferably a few small drops of paste at the bottom of the jar.
You could also make a paste using our silver powder and a little commercial epoxy glue - the method can be found under Silver powder C920 on page C8. Only spot gluing is required, but keep a weight on the target while drying/ curing.
TARGETS - UNMOUNTED
Note: Pre 2007 Emitech instruments use 54mm targets. New size is 57mm and 60mm. However, we can offer target in any diameter and many thicknesses.
Unless otherwise stated, our targets are 4N purity. If you require a higher purity, please inquire.