Ion sputter calibration standard, nickel/chromium

Nickel/chromium
Consisting of 12 alternating layers: 6 layers of Cr (~53nm) and 6 layers of Ni (~64nm) for a total thickness of ~700nm with a maximum variation across the 75mm production wafer of ±2%. Standard is on a 10 x 30mm section of a polished silicon wafer. The mass density of Cr and Ni was measured using electron beam excitation and measuring characteristic X-ray intensities.

Code Title Pack Size Availability Price Updated: 18-01-2022
GF353 Ion sputter calibration standard, nickel/chromium Each 2 weeks AU $1,524.00