Combined sputtering and carbon coating system

Q150T Plus - Turbomolecular pumped coater

The Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10^-5 mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging. Similarly, lower scattering allows for high purity, amorphous carbon films of high density. 

Key features

• New touch and swipe capacitive screen
• USB port for upgrades and download of process log files
• Multiple-user profiles can be set up on one machine
• New software sorts recipes per user according to recent use
• 16GB of memory can store more than 1000 recipes
• New multi-colour LED visual status indicator
• Capable of achieving vacuum of 5 x 10-5 mbar

The Q150T Plus is available in three configurations: 

-        Q150T S Plus –  an automatic sputter coater for non-oxidising metals. Sputtering targets include; Cr, Ir, W, ITO, Al  

         other targets available 

-        Q150T E Plus  –  an automatic carbon cord coater for SEM applications such as EDS and WDS.

         Metal evaporation/aperture cleaning option available. 

-        Q150T ES Plus –  a combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds. Metal evaporation/aperture cleaning option available. 

Recommended applications for Q150T Plus: 

•  High-resolution magnification SEM 

•  Protective platinum layers for FIB

•  R&D of corrosion-, friction-, and wear protective layers 

•  Protective layers on medical devices 

•  BSE imaging

•  EDX, WDS, EBSD analysis 

•  Carbon coating of replicas