Compact diaphragm vacuum pump

Compact and efficient small Japanese made diaphragm vacuum pumps, especially designed for clean-room use, in the manufacture of semiconductor devices, for evacuating medium sized vacuum desiccators or for suction on a filter flask. These pumps are useful for numerous other applications where an intermediate vacuum is required or when considerable water vapour is pumped.Diaphragm pumps are a proficient and environmentally friendly alternative to water jet pumps. They do not consume water and, therefore, do not produce contaminated waste water.Note: A larger diaphragm pump is available in the Emitech range (K pages). However, it should be noted that larger diaphragm pumps, w...

Compact and efficient small Japanese made diaphragm vacuum pumps, especially designed for clean-room use, in the manufacture of semiconductor devices, for evacuating medium sized vacuum desiccators or for suction on a filter flask. These pumps are useful for numerous other applications where an intermediate vacuum is required or when considerable water vapour is pumped.

Diaphragm pumps are a proficient and environmentally friendly alternative to water jet pumps. They do not consume water and, therefore, do not produce contaminated waste water.

Note: A larger diaphragm pump is available in the Emitech range (K pages). However, it should be noted that larger diaphragm pumps, when compared with rotary pumps (also called mechanical or fore-pumps) are a little noisier, require a little more maintenance, do not achieve as good an ultimate vacuum and are more expensive. The advantage of being totally oil-free remains and it is known that rotary pump oil can contaminate a system, streaming past the diffusion pump. Arguments for a diaphragm pump backing a turbo-molecular pump are weak, since that pump's action scarcely allows oil vapour into the pumped space.

Features

  • Oil-free for clean-room use
  • Spark-less electro magnetic drive
  • Long term high reliability
  • Designed to minimise noise generation
  • Compact design with strong Nylon housing
  • Inlet and outlet HEPA filters

Specifications

Cat. No. VFV-30 VFV-60
Pumping Power 2.5 l/min (0.088 cfm)
Ultimate Pressure -300 mmHg (-40 kPa) -600 mmHg (-80 kPa)
Power Requirement as required VAC
Consumption Power 5.0 W 10.0 W
Dimensions (DxWxH) 132 x 76 x 67mm 140 x 80 x 140mm
Weight 800g 1250g
Duty Cycle Continuous
Life Expectancy > 8760 hours
Wafer Size Up to 6-inch 8 and 12-inch

Accessories
Electrostatic discharge (ESD) Safe Tubing
Static-Dissipative Grounding Kit

HEPA filter specifications
Water filtering time: 20s (Do not let the pump "inhale" liquid!); pressure loss: 0.42kPa; trapping efficiency: 99.99% of 0.3Micrometre particles; maximum filter temperature: 120 deg. C Manufacturer is ISO9001 certified.

Note
VFV30-240 and VFV60-240 are suitable for Australia, New Zealand, Europe and other countries with a voltage of 220 - 240V.
VFV30-110 and VFV60-110 are suitable for USA, Canada and other countries with a voltage of 110V.

Supplied with a tube connector and tubing.

Considerations for low vacuum pump applications and selection
HEPA Filter Kit for Vacuum Pump

Code Title Pressure Voltage Pack Size Availability Price
VFV30-110 Compact diaphragm vacuum pump 300 mmHg 110V each 2 weeks AU $389.00
VFV30-240 Compact diaphragm vacuum pump 300 mmHg 240V each Only 1 AU $411.00
VFV60-110 Compact diaphragm vacuum pump 600 mmHg 110V each 2 weeks AU $696.00
VFV60-240 Compact diaphragm vacuum pump 600 mmHg 240V each 2 weeks AU $696.00
Code Title Pressure Voltage Pack Size Availability Price
VFV30-110 Compact diaphragm vacuum pump 300 mmHg 110V each 2 weeks AU $389.00
VFV30-240 Compact diaphragm vacuum pump 300 mmHg 240V each Only 1 AU $411.00
VFV60-110 Compact diaphragm vacuum pump 600 mmHg 110V each 2 weeks AU $696.00
VFV60-240 Compact diaphragm vacuum pump 600 mmHg 240V each 2 weeks AU $696.00