{"product_id":"duoq-large-chamber-sputter-coater","title":"DuoQ large chamber sputter coater","description":"\u003cp\u003eThe DuoQ is an automated and versatile large chamber dual sputter coater offering unparalleled ease of use and flexibility based on your application needs. Recommended for controlled thin film deposition for electron microscopy sample preparation and material fabrication.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eFeatures:\u003c\/strong\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli\u003eTurbomolecular pumped system with ultimate vacuum of 1 x 10\u003csup\u003e-6\u003c\/sup\u003e mbar, enabling high quality coatings \u003c\/li\u003e\n\u003cli\u003eDual head design offering even deposition of thin film coatings across samples up to 150mm in diameter \u003c\/li\u003e\n\u003cli\u003eOptimised planetary stages for deposition across 100mm and 150mm diameter samples \u003c\/li\u003e\n\u003cli\u003eIntegrated Film Thickness Monitor (FTM) to control deposition of coating \u003c\/li\u003e\n\u003cli\u003eIntuitive and responsive touchscreen colour panel design \u003c\/li\u003e\n\u003cli\u003eMulti-colour LED visual status indicator offering process updates \u003c\/li\u003e\n\u003cli\u003ePre-set recipes for standard protocols resulting in sample reproducibility \u003c\/li\u003e\n\u003cli\u003eCustomisable recipes enabling users to tailor process parameters to their specific requirements\u003c\/li\u003e\n\u003cli\u003eCompatible with a range of target materials \u003c\/li\u003e\n\u003c\/ul\u003e\u003cp\u003e\u003cstrong\u003eApplications:\u003c\/strong\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectron Microscopy \u003c\/strong\u003e- High resolution imaging for detailed surface and structural analysis. Enhanced surface conductivity for improved imaging performance. Uniform fine-grained coatings for superior sample preparation. Reduced charging effects and improved analytical accuracy.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaterials Research\u003c\/strong\u003e - Precision thin film deposition for advanced applications. Controlled materials fabrication with consistent results. Capability to process large-area substrates efficiently. Support for research, development, and prototype production\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAdvanced Materials \u003c\/strong\u003e- Novel batteries and fuel cells. Development and study of quantum materials. Semiconductor materials for electronics and microdevices. Photonic materials for optical and communication systems.\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp\u003e\u003cstrong\u003eSpecifications:\u003c\/strong\u003e\u003c\/p\u003e\u003ctable style=\"margin-right: calc(0%); width: 100%;\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cstrong\u003eStandard Stages\u003c\/strong\u003e\u003cbr\u003e\u003cstrong\u003e(Extended or short)\u003c\/strong\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cp\u003e\u003cstrong\u003e100mm (4’’) Wafer Stage\u003c\/strong\u003e - Adjustable stage for 2”, 3” and 4” wafers, supplied with a 4” diameter stub holder accommodating up to 18 x 3.2mm pin stubs.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e150mm (6’’) Wafer Stage\u003c\/strong\u003e - Adjustable stage for 4” and 6” wafers, supplied with a 6” diameter stub holder accommodating up to 27 x 3.2mm pin stubs.\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\n\u003cstrong\u003eStage Options\u003c\/strong\u003e\u003cbr\u003e\u003cstrong\u003e(Extended or short)\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e\n\u003cstrong\u003e8 Place Stub Stage\u003c\/strong\u003e - Designed for 8 x 25mm or 30mm stubs or resin embedded samples\u003cbr\u003e\u003cp\u003e\u003cstrong\u003eSlide Stage\u003c\/strong\u003e - Microscope slide stage for up to two 75mm x 25mm slides or 8 x 1\/8” pin stubs.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eTilt Stage\u003c\/strong\u003e - Six stub positions for 15mm, 6.5mm or 3.2mm pin stubs. Tilts up to 90° from horizontal plane.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e9 Place Coverslip Stage\u003c\/strong\u003e - Designed to accept 9 x standard coverslips 20mm x 20mm\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\u003cstrong\u003eInstrument Size\u003cbr\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e440mm (W) x 562mm (H) x 551mm (D), 912mm (H) with chamber open\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\u003cstrong\u003eWeight\u003cbr\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e40kg (52kg packed)\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\u003cstrong\u003eWork chamber\u003cbr\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e300mm Ø diameter, 220mm (H)\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\u003cstrong\u003eSpecimen Stage\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e\n\u003cp\u003e80mm (H) from chamber base (short stage required for sputtering tall samples), 100mm and 150mm Ø diameter substrate.\u003c\/p\u003e\n\u003cp\u003e145mm (H) from chamber base (extended stage required for sputtering short samples), 100mm and 150mm Ø diameter substrate.\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\n\u003cstrong\u003eVacuum\u003c\/strong\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e1 x 10\u003csup\u003e-6\u003c\/sup\u003e mbar (ultimate)\u003cbr\u003e5 x 10\u003csup\u003e-6\u003c\/sup\u003e mbar(operational)\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cstrong\u003eVacuum Gauge Range\u003c\/strong\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e1000 mbar to 6.7x10\u003csup\u003e-9\u003c\/sup\u003e mbar\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eUser Interface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003eTouch screen colour display\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\u003cstrong\u003eSupply Voltage\u003cbr\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e100-240V, 50-60Hz\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\u003cstrong\u003ePower Consumption\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e1400VA\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\u003cstrong\u003eDeposition Current\u003cbr\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e1 - 150mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\u003cstrong\u003eDeposition Rate\u003cbr\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e0.1 – 20nm\/min (e.g. for gold)\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\u003cstrong\u003eSputter Timer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003e0 - 480 min\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSputter Target\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e\u003cp\u003eTarget disc style, 57mm Ø diameter x 0.3mm thickness (gold and chromium supplied as standard)\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\n\u003cstrong\u003eFilm Thickness Monitor (FTM) Quartz Crystal\u003c\/strong\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003eGold, 12mm Ø diameter, 5MHz RC quartz crystals\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFTM Thickness Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e1 – 2000nm\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 33.5289%;\"\u003e\u003cstrong\u003eSite Requirements\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 65.3128%; text-align: center;\"\u003eIndoor use only\u003cbr\u003eTemperature: 15°C to 25°C\u003cbr\u003eHumidity: \u0026lt;75% non-condensing\u003cbr\u003eAltitude: 2000m\u003cbr\u003eVented gas (preferred): Nitrogen or argon\u003cbr\u003eProcess gas (preferred): Argon\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e\u003cp\u003e\u003cstrong\u003eDuoQ supplied with:\u003c\/strong\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli\u003e1 x Cr (0.5mm thickness x 57mm diameter) and 1 x Au (0.1mm thickness x 57mm diameter)\u003c\/li\u003e\n\u003cli\u003e100mm and 150mm Wafer Stage (QUO34603)\u003c\/li\u003e\n\u003cli\u003eFilm Thickness Monitor (FTM) Short and Tall (QUO35296)\u003c\/li\u003e\n\u003cli\u003eFull Range Gauge\u003c\/li\u003e\n\u003cli\u003eAccessories pack\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp\u003e\u003ca href=\"https:\/\/proscitech1-my.sharepoint.com\/:b:\/g\/personal\/ben_proscitech_com\/IQCXWM23nTqyR4V2mlcexCk9AfJzYyOxjeWypskIAXJsAJE?e=on1Euz\" rel=\"noopener noreferrer\" style='line-height:1.42;   text-decoration:none;   text-align:center;   white-space:normal;   font-size:calc(var(--typeBaseSize) + 2px);   font-weight:700;   display:inline-block;   padding:var(--btnPadding);   margin:0;   width:auto;   min-width:90px;   vertical-align:middle;   cursor:pointer;   border:1px solid transparent;   -webkit-user-select:none;           user-select:none;   -webkit-appearance:none;   -moz-appearance:none;   border-radius:var(--buttonRadius);   color:{{ settings.color_button_text | default: \"#fff\" }};   color:var(--colorBtnPrimaryText);   background:{{ settings.color_button | default: \"#000\" }};   background:var(--colorBtnPrimary);' target=\"_blank\"\u003eDuoQ product brochure\u003c\/a\u003e\u003cbr\u003e\u003ca href=\"http:\/\/www.quorumtech.com\/product-videos\"\u003e\u003c\/a\u003e\u003c\/p\u003e","brand":"Quorum Technologies","offers":[{"title":"DuoQ \/ Each","offer_id":49022926225598,"sku":"QUODUOQ","price":90813.0,"currency_code":"AUD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1784\/2811\/files\/QUODQ.png?v=1789430749","url":"https:\/\/proscitech.com.au\/products\/duoq-large-chamber-sputter-coater","provider":"ProSciTech","version":"1.0","type":"link"}