Large chamber critical point dryer

The K850WM is designed to critical point dry a complete 150mm (6") wafer. The K850WM is fitted with thermo-electric heating and adiabatic cooling and temperature control of 5 deg. C cooling and 35 deg. C during heating. This ensures the critical point is accurately obtained, avoiding excess pressures or temperatures, or the need to rely on pressure relief valves to control pressure during the heating cycle. The K850WM has a vertical chamber which allows top loading of specimens. A viewing port is fitted in the top plate for sample observation. The K850WM sample exchange mechanism is simple to use and ensures the sample remains under liquid during loading.

Sample handling
100mm or 150mm diameter wafers are he...

The K850WM is designed to critical point dry a complete 150mm (6") wafer. The K850WM is fitted with thermo-electric heating and adiabatic cooling and temperature control of 5 deg. C cooling and 35 deg. C during heating. This ensures the critical point is accurately obtained, avoiding excess pressures or temperatures, or the need to rely on pressure relief valves to control pressure during the heating cycle. The K850WM has a vertical chamber which allows top loading of specimens. A viewing port is fitted in the top plate for sample observation. The K850WM sample exchange mechanism is simple to use and ensures the sample remains under liquid during loading.

Sample handling
100mm or 150mm diameter wafers are held in a PTFE holding tray. The tray including wafer is immersed in acetone in order to remove all moisture from the sample. After dehydration, the wafer and holder is transferred into the pre-cooled sample chamber using the wafer transfer device. On completion of the critical point drying process, the wafer is removed from the chamber using the transfer device prior to further processing.

Features:

  • 170mm diameter chamber - optimised for wafer / MEMS drying
  • Vertical chamber with top filling and bottom draining - ensures specimens do not become uncovered during drying
  • Thermoelectric heating - accurate temperature control
  • Fine control needle valve pressure let down - precise control
  • Temperature monitoring and control with thermal cut-out protection
  • Pressure monitoring with safety cut out for over pressure


Specifications:

  • Supplied with - PTFE specimen holder (for a 150mm wafer), high pressure CO2 hose, operating manual and test certificate
  • Chamber size - 170mm internal diameter x 15mm high
  • Test pressure - 3000psi
  • Operating temperature - Normal operating temperature 35 deg. C (critical point temperature is 32 deg. C)
  • Operating pressure - 1350psi (critical point pressure 1172psi)
  • Pressure safety cut-out - 1700psi
  • Dimensions - W450 x D350 x H175mm
  • Weight - 12kg
  • Electrical - 230V 50Hz (3A max) or 115V 60Hz (6A max)
  • Site considerations - Requires space for CO2 cylinder
  • Requirements - E4860 Heater/chiller (for cooling chamber), EK3102 CO2 bottle heating system


Optional Accessories:

  • KE4870 - Recirculating heat/chiller 0.2HP (1400 watts) pressure pump
  • KE4870 /110V - Recirculating heat/chiller 0.2HP (1400 watts) pressure pump
  • KEK3102 - CO2 conditioning system
Code Title Pack Size Availability Price
K850WM Large chamber critical point dryer each 10 weeks Quote only Quote
Code Title Pack Size Availability Price
K850WM Large chamber critical point dryer each 10 weeks Quote only Quote