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No. 3 pump two stage (Fomblin) (approx 4m3/h)

The Edwards Fomblinised RV3 rotary pump is supplied as standard with the K1050X RF Plasma Etcher/Asher/Cleaner and use is essential if oxygen is to be used as a process gas. 

The pump has been especially modified and cleaned to accept Fomblin® oil, which is compatible with oxygen gas in normal operation.


Code Title Pack Size Availability Price Updated: 20-09-2021
K3176 No. 3 pump two stage (Fomblin) (approx 4m3/h) each 6 weeks Quote only Quote
Code Title Pack Size Availability Price
K3176 No. 3 pump two stage (Fomblin) (approx 4m3/h) each 6 weeks Quote only Quote