No. 3 pump two stage (Fomblin) (approx 4m3/h)
The Edwards Fomblinised RV3 rotary pump is supplied as standard with the K1050X RF Plasma Etcher/Asher/Cleaner and use is essential if oxygen is to be used as a process gas.
The pump has been especially modified and cleaned to accept Fomblin® oil, which is compatible with oxygen gas in normal operation.
|K3176||No. 3 pump two stage (Fomblin) (approx 4m3/h)||each||6 weeks||Quote only||Quote|