VGDQ pneumatic high vacuum damper valve (angle valve), motivated by compressed air, pushes the cylinder to up and down move with the valve rod by changing the direction of electromagnetism to transform the gas circuit direction, which drives the valve to open or close, in order to cut off or connect gas flow in the Vacuum system. VGDQ-J is angle type and VGDQ-S is three-way type with pre-pumping. Applicable medium can be air and non-corrosive gases.
Basic Dimensions
Applicable Scope (Pa)
105 - 1.3 x 10-4
Valve Leak Rate (Pa.L/S)
≤1.3 x 10-6
Me...
VGDQ pneumatic high vacuum damper valve (angle valve), motivated by compressed air, pushes the cylinder to up and down move with the valve rod by changing the direction of electromagnetism to transform the gas circuit direction, which drives the valve to open or close, in order to cut off or connect gas flow in the Vacuum system. VGDQ-J is angle type and VGDQ-S is three-way type with pre-pumping. Applicable medium can be air and non-corrosive gases.