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Prices are current as of Wednesday, 02/12/2020.
Prices shown are in AUD and GST exclusive. Tax is added at checkout.

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Product Code: KQ300R-T

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If you are interested in this product, please contact us at support@proscitech.com.

A fully automatic, free-standing sputter coater ideally suited for thin film applications and for conductive coating of scanning electron microscopy (SEM) specimens.

At the operational heart of the KQ300T-D is a large chamber fitted with two independent sputtering heads. This dual-head configuration allows two different metals to be sequentially sputtered without the need to 'break' vacuum. A dual channel film thickness monitor option is available.

The system is designed to sputter a wide range of oxidising metals, eg chromium (Cr) and aluminium (Al), and non-oxidising (noble) metals, eg gold (Au) and platinum (Pt).

The KQ300T-D sputter coater has a 300mm x 127mm work chamber and a specimen stage that accepts substrates of 2-4" wafer sizes as standard and 6" wafers with an optional stage accessory. An optional extended height glass chamber is available to enable coating of larger specimens.

KQ300 is available in three formats:

  • KQ300R-T - Sputter coater, large chamber, rotary-pumped, triple target
  • KQ300T-D - Sputter coater, large chamber, turbo-pumped, dual target
  • KQ300T-T - Sputter coater, large chamber, turbo-pumped, triple target

Required is a backing pump: we recommend a 50L/m two-stage rotary pump with oil mist filter - (sold separately)

More information and technical specifications

Product video of Q series of sputter/carbon coaters


Orders with items in stock are packed within 24 hours. We ship with our best choice of courier, depending on goods ordered and shipping address provided.


Standard delivery

Express delivery


Next day



2-3 business days



4-10 business days

2-3 business days


6-14 business days

2-3 business days



5-14 business days

*Note: Delivery times are as provided by our carriers and are estimates only. Delays may occur during peak periods, and due to factors outside the carriers' control.

Standard shipping is $15 in Australia (free on orders over $200). Add $5 to ship Express (under 2kg only)


Order online and collect from our warehouse in Townsville.


Freight Charge

Ready for collection

11 Carlton Street, Kirwan


Once invoice has been emailed
(Less than 1 business day)

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