Turbomolecular pump, 63L/s for air, including electric resource controller

model

-

FF-63/80

capacity

L/S

N2:62

He:55

compression ratio

mbar

N2:>1*107

He:>2*103

ultimate vacuum

mbar

<3.5*10-8 

discharge flange

-

KF16

suction flange

-

DN63 LF

bearing

-

grease lubricated ceramic bearing

rated rotation speed

rpm

72000

start-up time

min

<2

vibration

Micrometre

<0.05

noise

dB(A)

<55

recommended backing pump

L/S

0.8-2

max. contineous for vacuum

N2

5 mbar

mounting direction

-

any

baking temperature

≤100

cooling method

-

air cooling,ambient temperature at 5~32 deg.

weight

Kg

2.6