Q150R Plus rotary pumped sputter coaters, 240V
SKU: QUOQ150R-S | Availability ⓘ
Q150R Plus rotary pumped sputter coaters, 240V
SKU: QUOQ150R-S | Availability ⓘ
The Q150R Plus sputter coaters are optimised for use with a rotary pump, which gives a vacuum down to 2 x10-2 mbar.
Sputter targets, carbon, stages, evaporation baskets and spares kits available separately. Pfeiffer DUO 6 two-stage rotary vacuum pump (EQT13034) is recommended for use with the Q150GB.
Available in three configurations:
- Q150R-S Plus: Automatic sputter coater for non-oxidising metals. Available sputtering targets including gold, gold/palladium and platinum.
- Q150R-E Plus: Automatic carbon cord coater for SEM applications such as EDS and WDS.
- Q150R-ES Plus: Combined system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds.
Features:
- Capable of achieving vacuum of 2 x 10-2 mbar
- New touch and swipe capacitive screen
- USB port for upgrades and download of log files
- Multiple-user profiles can be set up on one machine
- New software sorts recipes per user, according to recent use
- 16GB of memory can store more than 1000 recipes
- New multi-colour LED visual status indicator
- Interchangeable stage options and plug-in heads
Recommended for use in Low and medium magnifications, SE signal boost (improved SE yield) when coating with as little as 1nm or less of Au, Au/Pd, Pt, Table-top SEM coating, Elemental analysis, Copper metallisation layers for SEM. Intended for Research Use Only.
Specifications:
Instrument case |
585mm W x 535mm D x 410mm H (maximum height during the opening of the coating head: 650mm) |
Weight |
28kg (packed: 42kg) |
Packed dimensions |
725mm W x 660 mm D x 680mm H |
Work chamber |
Borosilicate glass 150mm ID x 127mm H |
Display |
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display |
User interface |
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due |
Sputter target |
Disc-style 57mm Ø. 0.1mm thick gold (Au) target is fitted as standard. R S and R ES versions only |
Specimen stage | 50mm Ø rotation stage with rotation speed of 8-20rpm. Other stages available on request. |
Vacuum |
Rotary pump: Optional 5m3/hr two-stage rotary pump with oil mist filter (order separately) Vacuum Measurement: Pirani gauge Ultimate vacuum: 2 x 10-2mbar* Sputter vacuum range: Between 2 x 10-2 to 1 x 10-1mbar for gold |
Processes |
Sputtering: Sputter current 1-80 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without breaking vacuum and with automatically built-in cooling periods) Carbon evaporation: A robust, ripple free DC power supply featuring pulse evaporation ensures reproducible carbon evaporation from cord sources. Current pulse: 30-75A current |
Visual status indicator |
A large status multi-colour indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance. The indicator LED shows the following states:
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*Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas