Sputter Targets

We supply high purity sputtering targets that are well produced and modestly priced. Metal targets unless otherwise stated are 4N pure ‐ which is 99.99%. All listed targets made from Au/Pd are in the ratio 60:40.

A wide range of unmounted disks or washer (annular) type sputtering targets are available, as well as targets mounted on backing plates, replacing the original target holders. (Please ask if you require a mounted target).

Often targets are mounted to a backing plate using a conductive glue. Alternatively, if the target is over‐sized, the edge may be formed around the edge of the backing plate ‐ if the target material is soft. If that is your preferred method, please order the target with at least 2mm greater diameter than the backing plate.

Additionally we can source many other sputtering targets in a variety of materials including ceramics, rare earth elements and metal oxides. Here are some examples of sputter target materials that we have supplied:W, Ag, Ti, Ce, ZnS, Au/Pd 60:40, Au/Pd 80:20, Zirconium oxide with 10‐15%wt Y2O3, Cr, Au, Al, Pt, Ir, Cu, Ag/Cu 90:10, Fe, Si micro‐crystalline, Si polycrystalline, Si n‐type, Si p‐type, Si undoped. Amalgams are more expensive to produce. So if an amalgam is sought to attain a finer coating, then it may be better to purchase Pt in lieu of Au/Pd, or Ir in lieu of Pt/Pd.

Most used for metal coatings in electron microscopy is gold. Evaporated or sputtered gold until it's a fairly thick coating forms islets and these give gold coating at high powers (> x30k) a granular appearance. Finest, least granular coatings as are required for FESEM are obtained using chromium and iridium. Chromium like Ir is practically grain‐free, but since Cr and its coatings readily oxidise, Ir is regarded as the superior high resolution coating material. Ir also is a "harder" (by atomic number) element and its coatings should yield higher resolution. Iridium is hard and brittle and the thinnest practical Ir target is 0.3mm.

Code Title Option 1 Option 2 Option 3 Availability Price
ABLAU20005 Gold disc 20mm diameter x 0.5mm thick, 99.99% purity Each No ETA Quote only Quote
VS20X01-AU Sputter Target, 20mm diameter Au 0.1mm each 4 weeks Quote only Quote
VS24X02-AUPD Sputter Target, 24mm diameter Au/Pd, 60/40 0.2mm each 4 weeks Quote only Quote
VS40X01-CU Sputter Target, 40mm diameter Cu 0.1mm each 4 weeks Quote only Quote
VS40X01-AG Sputter Target, 40mm diameter Ag 0.1mm each 4 weeks Quote only Quote
VS40X01-AU Sputter Target, 40mm diameter Au 0.1mm each 4 weeks Quote only Quote
VS40X01-PD Sputter Target, 40mm diameter Pd 0.1mm each 4 weeks Quote only Quote
VS40X01-PT Sputter Target, 40mm diameter Pt 0.1mm each 4 weeks Quote only Quote
VS40X05-AG-X Sputter Target, 40mm diameter Ag 0.5mm each 3 weeks Quote only Quote
VS40X05-AU-X Sputter Target, 40mm diameter Au 0.5mm each 3 weeks Quote only Quote
VS40X05-PD-X Sputter Target, 40mm diameter Pd 0.5mm each 3 weeks Quote only Quote
VS40X05-PT-X Sputter Target, 40mm diameter Pt 0.5mm each 3 weeks Quote only Quote
VS40X05-CU-X Sputter Target, 40mm diameter Cu 0.5mm each 3 weeks Quote only Quote
VS50X01-AU-X Sputter Target, 50mm diameter Au 0.1mm each 3 weeks Quote only Quote
VS50X02-AU-X Sputter Target, 50mm diameter Au 0.2mm each 3 weeks Quote only Quote
VS50X10-AU-X Sputter Target, 50mm diameter Au 1.0mm each 3 weeks Quote only Quote
VS50X02-AU Sputter Target, 50mm diameter Au 0.2mm each 4 weeks Quote only Quote
VS54X01-AG-X Sputter target, 54mm diameter Ag 0.1mm each 3 weeks Quote only Quote
VS54X01-AU-X Sputter target, 54mm diameter Au 0.1mm each 3 weeks Quote only Quote
VS54X01-AUPD-X Sputter target, 54mm diameter Au/Pd 0.1mm each 3 weeks Quote only Quote
VS54X01-PD-X Sputter target, 54mm diameter Pd 0.1mm each 3 weeks Quote only Quote
VS54X01-PT-X Sputter target, 54mm diameter Pt 0.1mm each 3 weeks Quote only Quote
VS54X10-AL-X Sputter target, 54mm diameter Al 1mm each 3 weeks Quote only Quote
VS54X10-CR-X Sputter target, 54mm diameter Cr 1mm each 3 weeks Quote only Quote
VS54X10-CU-X Sputter target, 54mm diameter Cu 1mm each 3 weeks Quote only Quote
VS54X10-FE-X Sputter target, 54mm diameter Fe 1mm each 3 weeks Quote only Quote
VS54X02-CR Sputter target, 54mm diameter Cr 0.2mm each 4 weeks Quote only Quote
VS54X03-IR Sputter target, 54mm diameter Ir 0.3mm each 4 weeks Quote only Quote
VS54X07-IR Sputter target, 54mm diameter Ir 0.7mm each 4 weeks Quote only Quote
VS54X01-AU Sputter target, 54mm diameter Au 0.1mm each 4 weeks Quote only Quote
VS57X01-AU-X Sputter target, 57mm diameter Au 0.1mm each 3 weeks Quote only Quote
VS57X01-AUPD-X Sputter target, 57mm diameter Au/Pd 0.1mm each 3 weeks Quote only Quote
VS57X02-AU-X Sputter target, 57mm diameter Au 0.2mm each 3 weeks Quote only Quote
VS57X03-AG-X Sputter target, 57mm diameter Ag 0.3mm each 3 weeks Quote only Quote
VS57X03-AU-X Sputter target, 57mm diameter Au 0.3mm each 3 weeks Quote only Quote
VS57X03-PD-X Sputter target, 57mm diameter Pd 0.3mm each 3 weeks Quote only Quote
VS57X03-PT-X Sputter target, 57mm diameter Pt 0.3mm each 3 weeks Quote only Quote
VS57X10-AL-X Sputter target, 57mm diameter Al 1.0mm each 3 weeks Quote only Quote
VS57X10-CU-X Sputter target, 57mm diameter Cu 1.0mm each 3 weeks Quote only Quote
VS57X10-FE-X Sputter target, 57mm diameter Fe 1.0mm each 3 weeks Quote only Quote
VS57X10-IR-X Sputter target, 57mm diameter Ir 1.0mm each 3 weeks Quote only Quote
VS57X10-MO-X Sputter target, 57mm diameter Mo 1.0mm each 3 weeks Quote only Quote
VS57X10-NI-X Sputter target, 57mm diameter Ni 1.0mm each 3 weeks Quote only Quote
VS57X10-RH-X Sputter target, 57mm diameter Rh 1.0mm each 3 weeks Quote only Quote
VS57X10-RU-X Sputter target, 57mm diameter Ru 1.0mm each 3 weeks Quote only Quote
VS57X10-TI-X Sputter target, 57mm diameter Ti 1.0mm each 3 weeks Quote only Quote
VS57X10-W-X Sputter target, 57mm diameter W 1.0mm each 3 weeks Quote only Quote
VS57X10-ZR-X Sputter target, 57mm diameter Zr 1.0mm each 3 weeks Quote only Quote
VS57X15-CR-X Sputter target, 57mm diameter Cr 1.5mm each 3 weeks Quote only Quote
VS57X05-IR-X Sputter target, 57mm diameter Ir 0.5mm Each 3 weeks Quote only Quote
VS57X05-NI-X Sputter target, 57mm diameter Ni 0.5mm each 3 weeks Quote only Quote
VS57X05-CU-X Sputter target, 57mm diameter Cu 0.5mm each 3 weeks Quote only Quote
VS57X05-ZR-X Sputter target, 57mm diameter Zr 0.5mm each 3 weeks Quote only Quote
VS57X05-TI-X Sputter target, 57mm diameter Ti 0.5mm each 3 weeks Quote only Quote
VS57X05-FE-X Sputter target, 57mm diameter Fe 0.5mm each 3 weeks Quote only Quote
VS57X05-W-X Sputter target, 57mm diameter W 0.5mm each 3 weeks Quote only Quote
VS57X05-PT-X Sputter target, 57mm diameter Pt 0.5mm each 3 weeks Quote only Quote
VS57X01-AG-X Sputter target, 57mm diameter Ag 0.1mm each 3 weeks Quote only Quote
VS57X05-AU-X Sputter target, 57mm diameter Au 0.5mm each 3 weeks Quote only Quote
VS57X07-IR-X Sputter target, 57mm diameter Ir 0.7mm each 3 weeks Quote only Quote
VS60X01-AUPD Sputter Target, 60mm diameter Au/Pd 0.1mm each Only 1 Quote only Quote
VS60X02-AU-X Sputter target, 60mm diameter Au 0.2mm each 3 weeks Quote only Quote
VS60X03-AG-X Sputter target, 60mm diameter Ag 0.3mm each 3 weeks Quote only Quote
VS60X03-AU-X Sputter target, 60mm diameter Au 0.3mm each 3 weeks Quote only Quote
VS60X03-PD-X Sputter target, 60mm diameter Pd 0.3mm each 3 weeks Quote only Quote
VS60X03-PT-X Sputter target, 60mm diameter Pt 0.3mm each 3 weeks Quote only Quote
VS60X10-AL-X Sputter target, 60mm diameter Al 1.0mm each 3 weeks Quote only Quote
VS60X10-CU-X Sputter target, 60mm diameter Cu 1.0mm each 3 weeks Quote only Quote
VS60X10-FE-X Sputter target, 60mm diameter Fe 1.0mm each 3 weeks Quote only Quote
VS60X10-IR-X Sputter target, 60mm diameter Ir 1.0mm each 3 weeks Quote only Quote
VS60X10-MO-X Sputter target, 60mm diameter Mo 1.0mm each 3 weeks Quote only Quote
VS60X10-NI-X Sputter target, 60mm diameter Ni 1.0mm each 3 weeks Quote only Quote
VS60X10-RH-X Sputter target, 60mm diameter Rh 1.0mm each 3 weeks Quote only Quote
VS60X10-RU-X Sputter target, 60mm diameter Ru 1.0mm each 3 weeks Quote only Quote
VS60X10-TI-X Sputter target, 60mm diameter Ti 1.0mm each 3 weeks Quote only Quote
VS60X10-W-X Sputter target, 60mm diameter W 1.0mm each 3 weeks Quote only Quote
VS60X10-ZR-X Sputter target, 60mm diameter Zr 1.0mm each 3 weeks Quote only Quote
VS60X15-CR-X Sputter target, 60mm diameter Cr 1.5mm each 3 weeks Quote only Quote
VS60X01-AU-X Sputter target, 60mm diameter Au 0.1mm each 3 weeks Quote only Quote
VS60X07-IR-X Sputter target, 60mm diameter Ir 0.7mm each 3 weeks Quote only Quote