Q300T T Plus sputter coater, 240V
Q300T T Plus sputter coater, 240V
Q300T T Plus – triple target sputter coater for specimens up to 200mm diameter
The Q300T T Plus is a large chamber, turbo-pumped coating system, ideally suited for sputtering a single large diameter specimen up to 8″/200mm or multiple smaller specimens over a similar diameter. Ideal for thin-film applications and SEM/FE-SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens.
Please note it is not possible to sequentially sputter three different sputtering metals from each sputtering head – for sequential coating see the Q300T D Plus.
Features:
- Ultimate vacuum of 5 x 10-5 mbar or less possible
- New touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-use profiles can be set up on one machine
- New software sorts recipes per user according to recent use
- 16GB of memory can store more than 1000 recipes
- New multi-colour LED visual status indicator
- Interchangeable stage options
- Three sputter heads for larger area deposition of different materials
The Q300T T Plus is recommended for Wafer Inspection and Multiple sample preparation for SEM. Intended for Research Use Only.
Specifications:
Instrument case |
590mm W x 535mm D x 420mm H (maximum height during the opening of the coating head: 772mm) |
Weight |
36kg (packed: 59kg) |
Packed dimensions |
730mm W x 630 mm D x 690mm H |
Work chamber |
Borosilicate glass with integral PET implosion guard Size 300mm outside diameter x 127mm High |
Display |
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display |
User interface |
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due |
Specimen stage |
A flat rotation stage for 6”(150mm) and 8” (200mm) wafers is fitted as standard. A rotating/tilt stage and the ‘rota cota’ rotary tilt stage are also options |
Vacuum |
Rotary pump: 4m3/hr, two stage rotary pump with oil mist filter for the Q300T T Plus Turbo pump: Internally mounted 70L/sec air cooled Vacuum Measurement: Pirani gauge as standard wider range gauge available as an option Ultimate vacuum: 5 x 10-5mbar* Sputter vacuum range: 5 x 10-2mbar* |
Processes |
Sputter Deposition Current: Single target: 1 - 150mA All targets: 60 - 420mA |
Visual status indicator |
A large status multi-colour indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance. The indicator LED shows the following states:
|
Services |
Gases: process gas argon, 99.999% Nominal 5psi |
*Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas
Q300T T PLUS product brochure
Product video of Q series of sputter/carbon coaters