Planotec silicon test specimen, mounted

The Planotec silicon calibration specimen is useful for magnification calibration or image distortion check in SEM and LM.Single crystal silicon, 5mm x 5mm. The squares repeat every 10µm (0.01mm). The dividing lines are about 1.9µm wide, formed by electron beam lithography. A broader marking line is written every 500µm (0.5mm) which is useful for light microscopy. Lines are etched, and approximately 300nm deep. Available unmounted or mounted on SEM specimen mounts. A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost.Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained in the image.Thickness: 675µmSi crystal orientation: <100>Wafer type: P-type/boron dopedResistance: 1-30 Ohm/cmTo avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the standard SEM pin mounts, the PEL16179 PELCO SEM sam...

The Planotec silicon calibration specimen is useful for magnification calibration or image distortion check in SEM and LM.

Single crystal silicon, 5mm x 5mm. The squares repeat every 10µm (0.01mm). The dividing lines are about 1.9µm wide, formed by electron beam lithography. A broader marking line is written every 500µm (0.5mm) which is useful for light microscopy. Lines are etched, and approximately 300nm deep. Available unmounted or mounted on SEM specimen mounts. A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost.

Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained in the image.

Thickness: 675µm
Si crystal orientation: <100>
Wafer type: P-type/boron doped
Resistance: 1-30 Ohm/cm

To avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the standard SEM pin mounts, the PEL16179 PELCO SEM sample stub vacuum desiccator would be ideal.

Mounts

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 Pin mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 Pin mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 9.5mm dia. x 9.5mm cylinder, JEOL
D 16281 15mm dia. x 15mm cylinder, JEOL, ISI/ABT/TOPCON
E 16291 15mm dia. x 10mm cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G   YousSupply mount or mount of your choice, not listed here (contact customer service)
K 16324 15mm dia. x 6mm cylinder, M4 Hitachi, Agilent / Keysight
L 16327 25mm dia. x 6mm cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.2mm dia. x 10mm cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 mount
P 16242 Pin mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25mm dia. x 10mm cylinder, JEOL
R 16144 Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Code Title Mount Certification Pack Size Availability Price Updated: 21-10-2021
STP615-A Planotec silicon test specimen, mounted Type A No Each 2 weeks AU $192.00
STP660-615-A Planotec silicon test specimen, mounted Type A Yes Each 2 weeks AU $1,339.00
STP615-B Planotec silicon test specimen, mounted Type B No Each 2 weeks AU $192.00
STP660-615-B Planotec silicon test specimen, mounted Type B Yes Each 2 weeks AU $1,269.00
STP615-C Planotec silicon test specimen, mounted Type C No Each 2 weeks AU $192.00
STP660-615-C Planotec silicon test specimen, mounted Type C Yes Each 2 weeks AU $1,269.00
STP615-D Planotec silicon test specimen, mounted Type D No Each 2 weeks AU $192.00
STP660-615-D Planotec silicon test specimen, mounted Type D Yes Each 2 weeks AU $1,269.00
STP615-E Planotec silicon test specimen, mounted Type E No Each 2 weeks AU $192.00
STP660-615-E Planotec silicon test specimen, mounted Type E Yes Each 2 weeks AU $1,269.00
STP615-F Planotec silicon test specimen, mounted Type F No Each 2 weeks AU $192.00
STP660-615-F Planotec silicon test specimen, mounted Type F Yes Each 2 weeks AU $1,235.00
STP615-G Planotec silicon test specimen, mounted Type G No Each 2 weeks AU $352.00
STP660-615-G Planotec silicon test specimen, mounted Type G Yes Each 2 weeks AU $1,415.00
STP615-K Planotec silicon test specimen, mounted Type K No Each 2 weeks AU $192.00
STP660-615-K Planotec silicon test specimen, mounted Type K Yes Each 2 weeks AU $1,262.00
STP615-L Planotec silicon test specimen, mounted Type L No Each 2 weeks AU $192.00
STP660-615-L Planotec silicon test specimen, mounted Type L Yes Each 2 weeks AU $1,207.00
STP615-M Planotec silicon test specimen, mounted Type M No Each 2 weeks AU $192.00
STP660-615-M Planotec silicon test specimen, mounted Type M Yes Each 2 weeks AU $1,276.00
STP615-O Planotec silicon test specimen, mounted Type O No Each 2 weeks AU $192.00
STP660-615-O Planotec silicon test specimen, mounted Type O Yes Each 2 weeks AU $1,276.00
STP615-P Planotec silicon test specimen, mounted Type P No Each 2 weeks AU $192.00
STP660-615-P Planotec silicon test specimen, mounted Type P Yes Each 2 weeks AU $1,276.00
STP615-Q Planotec silicon test specimen, mounted Type Q No Each 2 weeks AU $192.00
STP660-615-Q Planotec silicon test specimen, mounted Type Q Yes Each 2 weeks AU $1,276.00
STP615-R Planotec silicon test specimen, mounted Type R No Each 2 weeks AU $192.00
STP660-615-R Planotec silicon test specimen, mounted Type R Yes Each 2 weeks AU $1,276.00
STP615-5 Planotec silicon test specimen, mounted Blackened glass slide No Each 2 weeks AU $717.00
STP660-615-5 Planotec silicon test specimen, mounted Blackened glass slide Yes Each 2 weeks AU $1,360.00
Code Title Mount Certification Pack Size Availability Price
STP615-A Planotec silicon test specimen, mounted Type A No Each 2 weeks AU $192.00
STP660-615-A Planotec silicon test specimen, mounted Type A Yes Each 2 weeks AU $1,339.00
STP615-B Planotec silicon test specimen, mounted Type B No Each 2 weeks AU $192.00
STP660-615-B Planotec silicon test specimen, mounted Type B Yes Each 2 weeks AU $1,269.00
STP615-C Planotec silicon test specimen, mounted Type C No Each 2 weeks AU $192.00
STP660-615-C Planotec silicon test specimen, mounted Type C Yes Each 2 weeks AU $1,269.00
STP615-D Planotec silicon test specimen, mounted Type D No Each 2 weeks AU $192.00
STP660-615-D Planotec silicon test specimen, mounted Type D Yes Each 2 weeks AU $1,269.00
STP615-E Planotec silicon test specimen, mounted Type E No Each 2 weeks AU $192.00
STP660-615-E Planotec silicon test specimen, mounted Type E Yes Each 2 weeks AU $1,269.00
STP615-F Planotec silicon test specimen, mounted Type F No Each 2 weeks AU $192.00
STP660-615-F Planotec silicon test specimen, mounted Type F Yes Each 2 weeks AU $1,235.00
STP615-G Planotec silicon test specimen, mounted Type G No Each 2 weeks AU $352.00
STP660-615-G Planotec silicon test specimen, mounted Type G Yes Each 2 weeks AU $1,415.00
STP615-K Planotec silicon test specimen, mounted Type K No Each 2 weeks AU $192.00
STP660-615-K Planotec silicon test specimen, mounted Type K Yes Each 2 weeks AU $1,262.00
STP615-L Planotec silicon test specimen, mounted Type L No Each 2 weeks AU $192.00
STP660-615-L Planotec silicon test specimen, mounted Type L Yes Each 2 weeks AU $1,207.00
STP615-M Planotec silicon test specimen, mounted Type M No Each 2 weeks AU $192.00
STP660-615-M Planotec silicon test specimen, mounted Type M Yes Each 2 weeks AU $1,276.00
STP615-O Planotec silicon test specimen, mounted Type O No Each 2 weeks AU $192.00
STP660-615-O Planotec silicon test specimen, mounted Type O Yes Each 2 weeks AU $1,276.00
STP615-P Planotec silicon test specimen, mounted Type P No Each 2 weeks AU $192.00
STP660-615-P Planotec silicon test specimen, mounted Type P Yes Each 2 weeks AU $1,276.00
STP615-Q Planotec silicon test specimen, mounted Type Q No Each 2 weeks AU $192.00
STP660-615-Q Planotec silicon test specimen, mounted Type Q Yes Each 2 weeks AU $1,276.00
STP615-R Planotec silicon test specimen, mounted Type R No Each 2 weeks AU $192.00
STP660-615-R Planotec silicon test specimen, mounted Type R Yes Each 2 weeks AU $1,276.00
STP615-5 Planotec silicon test specimen, mounted Blackened glass slide No Each 2 weeks AU $717.00
STP660-615-5 Planotec silicon test specimen, mounted Blackened glass slide Yes Each 2 weeks AU $1,360.00