TurboQ hi-vacuum sputter coaters
TurboQ hi-vacuum sputter coaters
The TurboQ is an automated and versatile turbo pumped coater offering unparalleled ease of use. Recommended for sample preparation for the examination of specimens using Electron Microscopy. Suitable for use with FE-SEM, FEG-SEM and FIB-SEM.
Available in three configurations:
- TurboQ S: Sputter coater for noble and/or oxidising metals. Cr target offered as standard. Options available: Pt, Ir, Au, W, Au/Pd, Pd, Cu, Ag, Ti, Co, Sn, ITO, Mg, Ta, Fe, Al, Mo, Ni
- TurboQ E: Evaporation coater for carbon/metal evaporation. Carbon rod source offered as standard. Options available: Carbon string.
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TurboQ ES: Combined coater offering both sputter coating and carbon and
metal evaporation. Cr target and carbon rod source available as standard.
Options available: Pt, Ir, Au, W, Au/Pd, Pd, Cu, Ag, Ti, Co, Sn, ITO, Mg, Ta, Fe, Al, Mo, Ni. Options available: Carbon fibre.
Features:
- High vacuum instrument for ultra-high-resolution EM up to and beyond 200k
- Ultra fine grain size for high-resolution analysis
- Rapid cycle time for maximum sample throughput
- Tilt stage design giving uniform coating of complex 3D structures
- Film Thickness Monitor (FTM) to control deposition of coating
- Intuitive and responsive touchscreen colour panel design
- Multi-colour LED visual status indicator offering process updates
- Pre-set recipes for standard protocols resulting in sample reproducibility
- Customisable recipes for tailored applications
- Easy and quick set-up of profiles
- Multiple stage options based on application needs
The TurboQ is designed to meet the requirements of various applications, ranging from biological sciences to material sciences.
Applications and Integrations:
- TurboQ S: Biological SEM applications - K850 Critical Point Dryer, Sample mounting, Sputter head, coating and SEM imaging.
- TurboQ E: TEM applications - Carbon rod head, coating, GloQube glow discharge and TEM grids.
- TurboQ ES: Materials workflow - Carbon fibre head, coating and elemental analysis.
Specifications:
| Coating Inserts | Sputter head, carbon rod, carbon string, glow discharge and metal evaporation |
| Stage Options | Rota Cota, 4" wafer stage, slide stage, 8 place stub stage (all stages available in an extended version) |
| Instrument Size |
440mm (W) x 556mm (H) x 551mm (D), 860mm (H) with chamber open |
| Weight |
S and E models: 36kg, 53kg packed ES model: 38kg, 54kg packed |
| Work chamber |
Chamber size 150mm diameter, 220mm (H) |
| User interface |
Touch screen colour display |
| Specimen Stage | Short stage: 65mm (H) from chamber base, 50mm diameter Tall stage: 145mm (H) from chamber base, 50mm diameter |
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Vacuum |
Ultimate vacuum 1x10-6mbar Vacuum gauge range 1000 to x10-9mbar Operational vacuum 5x10-6mbar |
| Supply Voltage |
100V – 240V |
| Sputter Coater (TurboQ S and TurboQ ES) | |
| Sputter Target |
Target Disc style, 57mm diameter x 0.3mm (thickness) (Cr supplied as standard) |
| Specimen Stage |
50mm diameter rotating stage |
| Deposition Current |
1-150mA |
| Deposition Rate |
0.1-20nm/min (e.g. for gold) |
| Sputter Timer | 0-60min |
| Evaporation Coater (TurboQ E and TurboQ ES) | |
| Evaporation Current (rod) | 5-75A (dependent on process) |
| Outgas Current |
1-40A |
| Carbon Source |
3.2mm rods or carbon fibre |
Models supplied with Glass Cylinder Assembly, Accessories pack and Startup Kit plus:
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TurboQ S |
TurboQ E |
TurboQ ES |
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Site requirements
Venting gas: Nitrogen supply for purging should be N4.8 (Zero Grade) 99.998% purity capable of supplying 0.5 bar (minimum 0.3 bar and maximum 1 bar) with nominal flow rate of 3 ± 0.2L/min for 60sec. The system is supplied with 3m plastic tubing 3mm I.D. x 6mm O.D. from quick release connectors to be fitted to a pressure regulator or plant supply.
Pumping gas: Argon supply for sputtering should be N4.8 (Zero Grade) 99.998% purity capable of supplying 0.5 bar (minimum 0.3 bar and maximum 1 bar) with nominal flow rate of 3 ± 0.2L/min for a 4-minute maximum sputter cycle time (some instruments may have specially extended sputter cycles). The system is supplied with 3m plastic tubing 3mm I.D. x 6mm O.D. from quick release connectors on the rear of the unit. It is the customer’s responsibility to connect from this hose to the pressure regulator set at approximately 10psi, from gas bottle or plant supply. Typically, a system will use 0.2L of Argon for a 4-minute sputter cycle.
Images are illustrative only. Please check product details before ordering.
