Pelcotec ISO CDMS calibration standards, 2mm - 100nm, traceable to NIST
Pelcotec ISO CDMS calibration standards, 2mm - 100nm, traceable to NIST
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Pelcotec CDMS ISO Critical Dimensions and Magnification Standards are easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.
Pelcotec ISO CDMS calibration standards, 2mm - 100nm, traceable to NIST:
Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10uµm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm
They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.
The CDMS standard may also be mounted on a custom mount of your choice.
Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2um to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.
Global certificate of traceability for CDMS
| Pelcotec CDMS-1-ISO | |
| Substrate: Silicon | Yes |
| Substrate size: 2.5 x 2.5mm | Yes |
| Substrate thickness: 525 ±10µm | Yes |
| Unique serial identification number per chip | Yes |
| Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm | Yes |
| Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch | Yes |
| High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch | No |
| Feature material: 50nm Cr (2mm - 5um) | Yes |
| Feature material: 20nm Cr/50nm Au (2µm and 1µm) | Yes |
| Feature material: 20nm Cr/50nm Au (500, 250 and 100nm) | No |
| Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) | T versions |
| Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) | C versions |
| Available unmounted | Yes |
| SEM mounts A-R available | Yes |
| Precision better than 0.3% | Yes |
Images are illustrative only. Please check product details before ordering.
