TurboQ hi-vacuum sputter coaters

SKU: QUOTURBOQ-E   |   Availability ⓘ

TurboQ hi-vacuum sputter coaters

SKU: QUOTURBOQ-E   |   Availability ⓘ
Model
Pack Size
P.O.R.


The TurboQ is an automated and versatile turbo pumped coater offering unparalleled ease of use. Recommended for sample preparation for the examination of specimens using Electron Microscopy. Suitable for use with FE-SEM, FEG-SEM and FIB-SEM.

Available in three configurations:

  • TurboQ S: Sputter coater for noble and/or oxidising metals. Cr target offered as standard. Options available: Pt, Ir, Au, W, Au/Pd, Pd, Cu, Ag, Ti, Co, Sn, ITO, Mg, Ta, Fe, Al, Mo, Ni
  • TurboQ E: Evaporation coater for carbon/metal evaporation. Carbon rod source offered as standard. Options available: Carbon string.
  • TurboQ ES: Combined coater offering both sputter coating and carbon and
    metal evaporation. Cr target and carbon rod source available as standard.
    Options available: Pt, Ir, Au, W, Au/Pd, Pd, Cu, Ag, Ti, Co, Sn, ITO, Mg, Ta, Fe, Al, Mo, Ni. Options available: Carbon fibre.

Features:

  • High vacuum instrument for ultra-high-resolution EM up to and beyond 200k
  • Ultra fine grain size for high-resolution analysis
  • Rapid cycle time for maximum sample throughput
  • Tilt stage design giving uniform coating of complex 3D structures
  • Film Thickness Monitor (FTM) to control deposition of coating
  • Intuitive and responsive touchscreen colour panel design
  • Multi-colour LED visual status indicator offering process updates
  • Pre-set recipes for standard protocols resulting in sample reproducibility
  • Customisable recipes for tailored applications
  • Easy and quick set-up of profiles
  • Multiple stage options based on application needs

The TurboQ is designed to meet the requirements of various applications, ranging from biological sciences to material sciences.

Applications and Integrations:

  • TurboQ S: Biological SEM applications - K850 Critical Point Dryer, Sample mounting, Sputter head, coating and SEM imaging.
  • TurboQ E: TEM applications - Carbon rod head, coating, GloQube glow discharge and TEM grids.
  • TurboQ ES: Materials workflow - Carbon fibre head, coating and elemental analysis.

Specifications:

Coating Inserts Sputter head, carbon rod, carbon string, glow discharge and metal evaporation
Stage Options Rota Cota, 4" wafer stage, slide stage
Instrument Size
440mm (W) x 556mm (H) x 551mm (D), 860mm (H) with chamber open
Weight
S and E models: 36kg, 53kg packed
ES model: 38kg, 54kg packed
Work chamber
Chamber size 150mm diameter, 220mm (H)
User interface
Touch screen colour display
Specimen Stage Short stage: 65mm (H) from chamber base, 50mm diameter
Tall stage: 145mm (H) from chamber base, 50mm diameter
Vacuum
Ultimate vacuum 1x10-6mbar
Vacuum gauge range 1000 to x10-9mbar
Operational vacuum 5x10-6mbar
Supply Voltage
100V – 240V
Sputter Coater (TurboQ S and TurboQ ES)
Sputter Target
Target Disc style, 57mm diameter x 0.3mm (thickness) (Cr supplied as standard)
Specimen Stage
50mm diameter rotating stage
Deposition Current
1-150mA
Deposition Rate
0.1-20nm/min (e.g. for gold)
Sputter Timer 0-60min
Evaporation Coater (TurboQ E and TurboQ ES)
Evaporation Current (rod) 5-75A (dependent on process)
Outgas Current
1-40A
Carbon Source
3.2mm rods or carbon fibre

Site requirements

Venting gas: Nitrogen supply for purging should be N4.8 (Zero Grade) 99.998% purity capable of supplying 0.5 bar (minimum 0.3 bar and maximum 1 bar) with nominal flow rate of 3 ± 0.2L/min for 60sec. The system is supplied with 3m plastic tubing 3mm I.D. x 6mm O.D. from quick release connectors to be fitted to a pressure regulator or plant supply.

Pumping gas: Argon supply for sputtering should be N4.8 (Zero Grade) 99.998% purity capable of supplying 0.5 bar (minimum 0.3 bar and maximum 1 bar) with nominal flow rate of 3 ± 0.2L/min for a 4-minute maximum sputter cycle time (some instruments may have specially extended sputter cycles). The system is supplied with 3m plastic tubing 3mm I.D. x 6mm O.D. from quick release connectors on the rear of the unit. It is the customer’s responsibility to connect from this hose to the pressure regulator set at approximately 10psi, from gas bottle or plant supply. Typically, a system will use 0.2L of Argon for a 4-minute sputter cycle.

TurboQ product brochure

Images are illustrative only. Please check product details before ordering.

Updated: 23-02-2025
Code Model Pack Size Availability* Price (ex GST)
QUOTURBOQ-E TurboQ E Each 4 weeks P.O.R.
QUOTURBOQ-ES TurboQ ES Each 4 weeks P.O.R.
QUOTURBOQ-S TurboQ S Each 4 weeks P.O.R.

* Availability Explanation

X weeks – the estimated lead time, based on the average time taken previously to fill orders from this particular supplier. Lead times are from when we receive your order until when we fill your order. For delivery times, please see shipping information below.

In Stock – Plenty of stock on the shelf, ready to ship.

No ETA – our supplier has advised they cannot provide an accurate ETA. Generally there is some issue with supply, and it may be more than 6 months.

REFUNDS AND RETURNS

Please ask prior to returning any goods.

Defective products should be returned to us for replacement or credit. It is best to contact support with as much detail as possible, including pictures, so we can quickly resolve the issue. ProSciTech Pty Ltd complies with the ACCC guidelines, available here: https://www.accc.gov.au/consumers/consumer-rights-guarantees/repair-replace-refund 

If you decide the item purchased does not suit your requirements, you may contact us to see if a return is possible. Some items may not be refunded, so please ask before purchase if you think a return may be necessary. The greater of $15 or 15% re-stocking charge  will be levied on materials returned due to an error on the part of the customer. We try to keep this charge minimal, however returns do have a cost to us.

SHIPPING INFORMATION

Shipping and Handling charges are $20 for Australian orders; free for orders over $200. 

In-stock items are generally sent same day. Orders are shipped shipped from Townsville, Queensland. Our couriers pick up from 2:30pm, so please place your order in plenty of time for processing and packing if you would like it sent same day. When items are not in stock, your order may be part-shipped. Items on back-order will be sent as soon as they become available.

ProSciTech will choose the courier for your order with consideration for the destination, value of parcel, weight and perishability of contents. It is our concern that our shipments reach you, our customer, rapidly and in good condition. Please contact us if you have any issues with a shipment and we will do our best to resolve it. Please keep in mind however, that our legal responsibility ends when goods are passed to the carrier.

Order Value Shipping and Handling charges
Greater than $200 - (exceptionally heavy or Dangerous Goods excluded). Free
Less than $200 $20
Express shipping $30

Delivery times:

Check your email for tracking details provided at time of shipping for updates of your parcel. We cannot guarantee delivery times, as this is outside of our control. The following are the delivery estimates as given by our couriers. 

Regular shipping
Queensland   1-3 business days 
Sydney   2-5 business days 

Melbourne, Adelaide, Hobart or Canberra 

 3-10 business days 

WA, NT and non-metro areas

 4-10 business days 
Express shipping
Australia wide   1-2 business days

Urgent Orders:

Please request "Express" if you would like us to upgrade your shipment to express delivery. Providing your order fits in a satchel and/or is under 1kg in weight, we will ship your order either DHL, TNT or Express Post. Larger or heavy orders need a quotation for additional freight costs.

Dangerous goods:

See the table on the page for DG shipment costs by road. Please specify when ordering if you require air service (this can be prohibitively expensive). Please request a quotation. We will charge at cost.
 

Shipping to New Zealand Destinations

Orders are now shipped 'receipted delivery'.

Charges:

Order Value Shipping and Handling charges
Greater than $200 - (exceptionally heavy or Dangerous Goods excluded). Free
Less than $200 $26 Minimum Charge

Heavy items (e.g. benchroll or large quantities of microscope slides) may require an additional freight charge - please ask for a quote.

DANGEROUS GOODS shipped to New Zealand: Dangerous goods will be air-freighted and the freight charge billed at cost. Typically, this will be about AUD $600AUD to New Zealand (Up to 2kg).

Delivery times: by air with signature on delivery, depending on courier, delivery can take 3-14 working days. Customs delays are unpredictable and can extend the delivery. Due to COVID19 delivery times have been extended through the couriers and are out of our control.

Shipping to Rest of World Destinations

Contact us for a quote for shipping. 

Delivery times: by air with signature on delivery, depending on courier, delivery can be 7-21 working days. Customs delays are unpredictable and can extend the delivery time. Due to COVID19 delivery times have been extended through the couriers and are out of our control.

DANGEROUS GOODS shipped outside Australia: Not available

GUARANTEE

All products are guaranteed as advertised. Defective products should be returned to us for replacement or credit. Please contact us prior to returning goods. 

We endeavour to provide accurate descriptions, illustrations, prices and stock availability, but errors and omissions are possible. All quotations are E&OE (Errors and Omissions Excepted) 

LIABILITY

All products are intended for laboratory applications only and the user assumes all responsibility involved in use and handling. We accept no liability for loss or damage resulting from the use or abuse of our products. 

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Trouble Shooting

  1. You do not receive the quote
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