|
MiniQ S
The cost effective, easy to use entry-level sputter coater.
Applications:
- Low and medium magnifications
- Table-top SEM coater
|
A pump is required for MiniQ.
Recommended:
|
|
RotaQ
The New Generation of Rotary Pumped EM Coaters
Three models available:
-
RotaQ S: Sputter coater for noble metals.
-
RotaQ E: Evaporation coater for carbon/metal evaporation.
-
RotaQ ES: Combined coater offering both sputter coating and carbon and metal evaporation.
|
A pump is required for RotaQ.
Recommended:
|
|
TurboQ
The New Generation of Hi-Vacuum EM Coaters
Three models available:
-
TurboQ S: Sputter coater for noble and/or oxidising metals.
-
TurboQ E: Evaporation coater for carbon/metal evaporation.
-
TurboQ ES: Combined coater offering both sputter coating and carbon and metal evaporation.
|
A pump is required for TurboQ.
Recommended:
|
|
Q150GB
Turbo Pumped System for Glove Box Use
Recommended applications:
- High resolution SEM and FIB-SEM
- Carbon coating for elemental analysis and carbon coating of TEM grids
|
A pump is required for Q150GB.
Recommended:
|
|
Q300T ES PLUS
Large size chamber, single sputter head.
Recommended applications:
- High resolution SEM
- Large samples e.g Silicon Wafers (up to 150mm)
- Protective platinum layers for FIB
- Carbon coating for elemental analysis and TEM
|
A pump is required for Q300T ES PLUS.
Dry pumping options:
|
|
Q300T D PLUS
Large size chamber, dual sputter head dual target.
Recommended applications:
-
Large samples e.g Silicon Wafers (up to 200mm diameter) or multiple small samples Wafer inspection
- Multiple sample preparation for SEM
- Thin-film applications and SEM/FE-SEM
|
A pump is required for Q300T D PLUS.
Dry pumping options:
|
|
Q300T T PLUS
Large size chamber, triple sputter head single target.
Recommended applications:
-
Large samples e.g Silicon Wafers (up to 200mm diameter) or multiple small samples Wafer inspection
- Multiple sample preparation for SEM
- Thin-film applications and SEM/FE-SEM
|
A pump is required for Q300T T PLUS.
Dry pumping options:
|