RotaQ rotary pumped sputter coaters
RotaQ rotary pumped sputter coaters
The RotaQ is an automated and versatile rotary pumped coater offering unparalleled ease of use. Recommended for sample preparation for the examination of specimens using Electron Microscopy. Suitable for use with Tungsten/LaB6 SEM and Benchtop SEM.
Available in three configurations:
- RotaQ S: Sputter coater for noble metals. Au target offered as standard. Au/Pd, Ag, Pt, Pt/Pd, Pd available as options.
- RotaQ E: Evaporation coater for carbon/metal evaporation. Carbon fibre source offered as standard.
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RotaQ ES: Combined coater offering both sputter coating and carbon and
metal evaporation. Au target and carbon fibre source available as standard. Au/Pd, Ag, Pt, Pt/Pd, Pd available as options.
Features:
- Recommended for low-medium magnification
- Suitable for use with Tungsten/LaB6 SEM and Benchtop SEM
- Rapid cycle time for maximum sample throughput
- Tilt stage design giving uniform coating of complex 3D structures
- Film Thickness Monitor (FTM) to control deposition of coating
- Intuitive and responsive touchscreen colour panel design
- Multi-colour LED visual status indicator offering process updates
- Pre-set recipes for standard protocols resulting in sample reproducibility
- Customisable recipes for tailored applications
- Easy and quick set-up of profiles
- Multiple stage options bas
The RotaQ is designed to meet the requirements of various applications.
Applications and Integrations:
- RotaQ S: Biological SEM applications - E3100 Critical Point Dryer, Sample mounting, Sputter head, coating and SEM imaging.
- RotaQ E: TEM applications - Carbon fibre head, coating and TEM grids.
Specifications:
| Coating Inserts | Sputter head, carbon rod, carbon string, glow discharge and metal evaporation |
| Stage Options | Rota Cota, 4" wafer stage, slide stage |
| Instrument Size |
440mm (W) x 556mm (H) x 551mm (D), 860mm (H) with chamber open |
| Weight |
S and E models: 32kg, 46kg packed ES model: 34kg, 48kg packed |
| Work chamber |
Chamber size 150mm diameter, 220mm (H) |
| User interface |
Touch screen colour display |
| USB Connectors |
Back-up process log files and recipes easily achievable using a USB Sputter Coater |
| Specimen Stage | Short stage: 65mm (H) from chamber base, 50mm diameter Tall stage: 145mm (H) from chamber base, 50mm diameter |
|
Vacuum |
Ultimate vacuum 6x10-3mbar Vacuum gauge range 1013 to x10-4mbar Operational vacuum 1x10-1mbar |
| Sputter Coater (RotaQ S and RotaQ ES) | |
| Sputter Target |
Target Disc style, 57 mm Ø diameter x 0.1 mm (thickness). Au target supplied as standard. |
| Specimen Stage |
50mm diameter rotating stage |
| Deposition Current |
1-150mA |
| Deposition Rate |
0.1-20nm/min (e.g. for gold) |
| Sputter Timer | 0-60min |
| Evaporation Coater (RotaQ E and RotaQ ES) | |
| Evaporation Current (rod) | 5-75A (dependent on process) |
| Outgas Current |
1-40A |
| Carbon Source |
3.2mm rods or carbon fibre |
| Power Supply |
90V 240V 50/60 Hz, 1350W including pump |
Models supplied with Glass Cylinder Assembly, Accessories pack and Startup Kit plus:
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RotaQ S |
RotaQ E |
RotaQ ES |
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Site requirements
Venting gas: Nitrogen supply for purging should be N4.8 (Zero Grade) 99.998% purity capable of supplying 0.5 bar (minimum 0.3 bar and maximum 1 bar) with nominal flow rate of 3 ± 0.2L/min for 60s. The system is supplied with 3m plastic tubing 3mm I.D. x 6mm O.D. from quick release connectors to be fitted to a pressure regulator or plant supply.
Pumping gas: Argon supply for sputtering should be N4.8 (Zero Grade) 99.998% purity capable of supplying 0.5 bar (minimum 0.3 bar and maximum 1 bar) with nominal flow rate of 3 ± 0.2L/min for a 4-minute maximum sputter cycle time (some instruments may have specially extended sputter cycles). The system is supplied with 3m plastic tubing 3mm I.D. x 6mm O.D. from quick release connectors on the rear of the unit. It is the customer’s responsibility to connect from this hose to the pressure regulator set at approximately 10psi, from gas bottle or plant supply. Typically, a system will use 0.2L of Argon for a 4-minute sputter cycle.