Evactron EP plasma decontaminators + Android
SKU: EMS91000-11 | Availability ⓘ
Evactron EP plasma decontaminators + Android
SKU: EMS91000-11 | Availability ⓘ
The Evactron EP decontaminators are the latest model in the E-Series cleaning systems ideal for cleaning high vacuum chambers, SEM/FIB and pre-cleaning of samples. They reduce hydrocarbon contamination from high vacuum chambers by breaking down the carbon and turning it into a gas phase that is then removed by the pumping system. With instant ignition from any vacuum level the highest cleaning rates are reached at low pressures. It uses flowing afterglow to remove surface hydrocarbons from vacuum chambers operating with turbo molecular pumps. Three models available compatible with leading SEM/FIB models.
Features:
- High cleaning efficiency
- Small footprint/compact plasma radical source (PRS)
- Operates at TMP and turbomolecular pressures
- "Pop" ignition (patent pending)
- Windows and Android GUI software
- Desktop controller
- Fits chambers and load locks
- Vacuum safety interlock
- High reliability at 20W and 13.56MHz power supply
- No vacuum gauge needed
- NW 40 flange standard, CF 2.75 optional
- Vacuum only operation interlock
- >100 Å/min cleaning rates
- Rack mount for system integration
- Elegant and compact design
- Windows GUI interface/Android tablet programming compatibility
Specifications:
- Energy efficient hollow cathode plasma
- Flow through gas supply
- Plasma Radical Source (PRS) design maximises delivery of radicals to chamber
- "Pop" ignition of the plasma works at pressures below 100Pa/750mTorr
- Low pressure operation 1-3Pa/7.5-22.5mTorr
- Starts and operates at turbo molecular pump compatible pressures
- Fixed match provides maximum plasma power transfer
Model | Description | Includes |
EMS91000-11 |
Evactron EP Plasma Decontaminator + Android For Hitachi 8200 / 4800 Series SEM |
Plasma Radical Source, Horizontal Configuration, Windows 7.0 GUI Programming Software, Table Top Controller, Cable Set (3.8m), System user manual |
EMS91000-12 |
Evactron EP Plasma Decontaminator + Android For JEOL TMP Systems |
Plasma Radical Source, Horizontal Configuration, 1cc ignition ballast, Windows 7.0 GUI Programming Software, Table Top Controller, Cable Set (3.8m), System user manual |
EMS91000-13 |
Evactron EP Plasma Decontaminator + Android For Zeiss |
Vertical Plasma Radical Source, Table Top Controller, Cable Set (3.8m), GUI Programming Software, System user manual |

Images are illustrative only. Please check product details before ordering.