Q150V Plus high-vacuum application sputter coaters, 240V
Q150V Plus high-vacuum application sputter coaters, 240V
The Q150V Plus is optimised for high-vacuum applications, with an ultimate vacuum of 1x10-6mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. The lower background pressure removes oxygen nitrogen and water vapour from the chamber, avoiding chemical reactions during the sputter process, which could otherwise lead to impurities or defects in the coatings. Similarly, lower scattering allows for high purity, amorphous carbon films of high density. The Q150V Plus offers all the benefits of the Q150T Plus, but with a finer grain size and thinner coating, for ultra-high-resolution applications (above x 200,000 magnification).
Three configurations available:
- Q150V-S ? an automatic sputter coater for oxidising metals with ultra-fine grain size. Available sputtering targets include chromium, iridium and all noble metals
- Q150V-E ? an automatic carbon coater (rod/cord) for TEM applications. For carbon coating TEM grids.
- Q150V-ES ? a combined system capable of both sputtering and carbon coating. The deposition head inserts can be swapped in seconds.
Sputter targets, carbon, stages, evaporation baskets and spares kits available separately. Pfeiffer DUO 6 two-stage rotary vacuum pump (EQT13034) is recommended for use with the Q150V or dry pumping with VacuuBrand MD1 diaphragm pump (EQT11540).
Sputter coating of noble and oxidising metals using the Q150V S & ES Plus for SEM applications. Ideal for thin film applications such as coating with ITO, W, Al, Zn. Carbon rod coating using the Q150V E & ES Plus. Recommended for magnifications:
? up to x 50k using Au
? up to x 100k using Pt
? above x 100k using Cr, Ir
Features:
- Ultimate vacuum of 1?10-6mbar
- New multi-colour LED visual status indicator
- 16Gb of flash memory can store more than 1000 recipes
- New software sorts recipes per user according to recent use
- Multiple-user profiles can be set up on one machine
- New touch and swipe capacitive screen
Recommended applications:
- Ultra-high-resolution magnification SEM
- Carbon coating of TEM grids
- Protective platinum layers for FIB
- R&D of corrosion-, friction-, and wear- protective layers
- Protective layers on medical devices
- BSE imaging
- EDX, WDS, EBSD analysis
- Carbon coating of replicas
- Nano-technology e.g. Zeolites, polymer nanobrushes
- For Research Use Only
Specifications:
Instrument case: 585mm W x 521mm D x 410mm H (total height with coating head open: 650mm)
Weight: 32.4kg (packed: 42kg)
Packed dimensions: 725mm W x 660mm D x 680mm H
Work chamber: Borosilicate glass 150 mm ID x 133 mm H
Display: 115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display
User interface: Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
Sputter target: Disc-style 57mm ?. A 0.3mm thick chromium (Cr) is fitted as standard. V S and V ES versions only
Specimen stage: 50mm ? rotation stage with rotation speed of 8-20 rpm. Other stages available on request.
Vacuum: Rotary pump: 5 m3/hr two-stage rotary pump with oil mist filter. Hydraulically-formed bellows stainless-steel backing line.
Turbo pump: Internally mounted 67 L/sec N2 air-cooled
Vacuum Measurement: Wide range gauge (10428)
Ultimate vacuum: 1 x 10-6 mbar*
Pump down time: 5x10-6 mbar in 30 mins*
Sputter vacuum range: Between 5 x 10-3 and 1 x 10-1mbar for gold targets
*Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas
